Lam
- Company Name:PKL
- Membership:Free Member
- Member Since:2007. 09.26
- Country/Region:Korea
- City:Chungcheongnam-do
- Contact:Soo-hong, Jeong
- Related Keywords:PKL, IC Photomask, Lam
Contact us
PKL
[Korea]
Feature
Large Area Mask (Normal LCD Mask) |
|||||
Glass Size & Type |
Address Size |
CD Tolerance |
CD Uniformity |
Defect Criteria |
Registration |
390x610x6T (U7550) |
0.1 ~ |
±0.2 |
0.2 |
1 |
±0.5 |
390x610x6T (U7650) |
0.1 ~ |
±0.2 |
0.2 |
1 |
±0.5 |
520X610X10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
500x750x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
520x800x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
700x800x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
800x920x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
800x920x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
850x1200x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
Large Area Mask (GTM Mask) |
|||||
Glass Size & Type |
Address Size |
CD Tolerance |
CD Uniformity |
Defect Criteria |
Registration |
390x610x6T (U7550) |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
390x610x6T (U7650) |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
520x800x10T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
800x920x10T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
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